Thin film PZT-based PMUT arrays for deterministic particle manipulation
| Autor: | Yongqiang Qiu, Liqiang Ren, Susan Trolier-McKinstry, Robert R. Benoit, Christopher Cheng, Holly S. Lay, Sumit Agrawal, Thomas E. Mallouk, Rudra Pratap, Sudhanshu Tiwari, Ajay Dangi, Sandy Cochran, Sri Rajasekhar Kothapalli |
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| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Acoustics and Ultrasonics business.industry TK Lead zirconate titanate 01 natural sciences Piezoelectricity chemistry.chemical_compound Transducer chemistry 0103 physical sciences PMUT Levitation Optoelectronics Ultrasonic sensor Electrical and Electronic Engineering Thin film business 010301 acoustics Instrumentation Excitation |
| ISSN: | 0885-3010 1525-8955 |
| Popis: | Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 $\mu \text{m}$ , a resonant frequency of ~8 MHz, and an operational bandwidth ( BW ) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at $5~V_{\mathrm {pp}}$ . The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 $\mu \text{m}$ silica beads was shown to be possible with 5 $V_{\mathrm {pp}}$ unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency. |
| Databáze: | OpenAIRE |
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