Synthesis and Growth Mechanism of Thin-Film TiO2 Nanotube Arrays on Focused-Ion-Beam Micropatterned 3D Isolated Regions of Titanium on Silicon

Autor:	Hamid Garmestani, Abdulkareem M. A. Al-Sammarraie, Hoda Amani Hamedani, Asim Bhatti, Zohreh R. Hesabi, Mohammad A. Khaleel, Faisal M. Alamgir, Simon W. Lee
Rok vydání:	2013
Předmět:	Materials science Fabrication X-ray photoelectron spectroscopy chemistry Silicon Etching (microfabrication) chemistry.chemical_element General Materials Science Nanotechnology Substrate (electronics) Thin film Focused ion beam Titanium
Zdroj:	ACS Applied Materials & Interfaces. 5:9026-9033
ISSN:	1944-8252 1944-8244
Popis:	In this paper, the fabrication and growth mechanism of net-shaped micropatterned self-organized thin-film TiO2 nanotube (TFTN) arrays on a silicon substrate are reported. Electrochemical anodization is used to grow the nanotubes from thin-film titanium sputtered on a silicon substrate with an average diameter of ~30 nm and a length of ~1.5 μm using aqueous and organic-based types of electrolytes. The fabrication and growth mechanism of TFTN arrays from micropatterned three-dimensional isolated islands of sputtered titanium on a silicon substrate is demonstrated for the first time using focused-ion-beam (FIB) technique. This work demonstrates the use of the FIB technique as a simple, high-resolution, and maskless method for high-aspect-ratio etching for the creation of isolated islands and shows great promise toward the use of the proposed approach for the development of metal oxide nanostructured devices and their integration with micro- and nanosystems within silicon-based integrated-circuit devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::09334b19e4048c71597aeada41f2d17d https://doi.org/10.1021/am402203m Zobrazit plný text záznamu