Optimization of the mechanical properties of magnetron sputtered diamond-like carbon coatings
| Autor: | A.N. Berthelsen, S. Sønderby, B.H. Christensen, K.P. Almtoft, Jørgen Bøttiger, L.P. Nielsen |
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| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
Materials science
Hydrogen Diamond-like carbon Annealing (metallurgy) Mechanical Engineering chemistry.chemical_element General Chemistry Nanoindentation Sputter deposition Electronic Optical and Magnetic Materials symbols.namesake chemistry Indentation Cavity magnetron Materials Chemistry symbols Electrical and Electronic Engineering Composite material Raman spectroscopy |
| Zdroj: | Berthelsen, A N, Bøttiger, J, Sønderby, S, Almtoft, K P, Christensen, B H & Nielsen, L P 2011, ' Optimization of the mechanical properties of magnetron sputtered diamond-like carbon coatings ', Diamond and Related Materials, vol. 20, no. 5-6, pp. 682-686 . https://doi.org/10.1016/j.diamond.2011.03.016 |
| DOI: | 10.1016/j.diamond.2011.03.016 |
| Popis: | Diamond-like carbon coatings containing hydrogen, a-C:H, were deposited by use of reactive DC magnetron sputtering with an industrial deposition system. The reactive gas C 2 H 2 was used in combination with carbon targets. Using Raman spectroscopy, nanoindentation and Rockwell C indentation, the mechanical properties of the coatings were optimized. Excessively high compressive stresses, which were measured with Raman spectroscopy, were found in the coatings with high hardness, resulting in poor adhesion to the substrates. By thermal annealing, these compressive stresses were reduced without altering the hardness, resulting in diamond-like carbon coatings with good adhesion. |
| Databáze: | OpenAIRE |
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