A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation

Autor: Kai Schlage, Sebastian Bommel, Roman Mannweiler, Adeline Buffet, Ezzeldin Metwalli, Stephan Botta, Stephan V. Roth, Gonzalo Santoro, Matthias Schwartzkopf, Johannes F. H. Risch, Ralph Döhrmann, Peter Müller-Buschbaum, Simon Brunner
Rok vydání: 2013
Předmět:
Zdroj: Review of scientific instruments 84, 043901 (2013). doi:10.1063/1.4798544
ISSN: 1089-7623
0034-6748
DOI: 10.1063/1.4798544
Popis: Review of scientific instruments 84, 043901 (2013). doi:10.1063/1.4798544
HASE (Highly Automated Sputter Equipment) is a new mobile setup developed to investigate deposition processes with synchrotron radiation. HASE is based on an ultra-high vacuum sputter deposition chamber equipped with an in-vacuum sample pick-and-place robot. This enables a fast and reliable sample change without breaking the vacuum conditions and helps to save valuable measurement time, which is required for experiments at synchrotron sources like PETRA III at DESY. An advantageous arrangement of several sputter guns, mounted on a rotative flange, gives the possibility to sputter under different deposition angles or to sputter different materials on the same substrate. The chamber is also equipped with a modular sample stage, which allows for the integration of different sample environments, such as a sample heating and cooling device. The design of HASE is unique in the flexibility. The combination of several different sputtering methods like standard deposition, glancing angle deposition, and high pressure sputter deposition combined with heating and cooling possibil-ities of the sample, the large exit windows, and the degree of automation facilitate many different grazing incidence X-ray scattering experiments, such as grazing incidence small and wide angle X-ray scattering, in one setup. In this paper we describe in detail the design and the performance of the new equipment and present the installation of the HASE apparatus at the Micro and Nano focus X-ray Scattering beamline (MiNaXS) at PETRA III. Furthermore, we describe the measurement options and present some selected results. The HASE setup has been successfully commissioned and is now available for users.
Published by American Institute of Physics, [S.l.]
Databáze: OpenAIRE
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