THz Gas Sensing Using Terahertz Time-Domain Spectroscopy with Ceramic Architecture

Autor:	Keiji Komatsu, Toshiyuki Iwamoto, Haruhiko Ito, Hidetoshi Saitoh
Rok vydání:	2022
Předmět:	General Chemical Engineering General Chemistry
Zdroj:	ACS omega. 7(35)
ISSN:	2470-1343
Popis:	Ceramic architectures based on chemical vapor deposition (CVD) are used to create unique crystal structures, morphologies, and properties. This study proposed room-temperature THz gas sensing using terahertz time-domain spectroscopy (THz-TDS) with ceramic architectures. We synthesized ceramic films on porous glass. Zinc oxide films were created using atmospheric CVD and amorphous carbon nitride films using the dissociative excitation reaction of BrCN with metastable Ar atoms. The transmission method was used in THz-TDS. A stainless hand-made gas cell with a Si window was applied for THz gas sensing. We defined "phase delay" equals VOC sensing response amount of sensing materials at each duration. Ppm-order THz gas sensing was performed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::086393c982a071ef764bd8f3f982553a https://pubmed.ncbi.nlm.nih.gov/36092607 Zobrazit plný text záznamu