GaAs 3-axis Coriolis vibrating micro rate gyro: concept and preliminary characterization
| Autor: | S. Masson, O. Ducloux, O. Le Traon, Iännis Roland, A. Bosseboeu |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
3-axis gyro
Materials science Condensed Matter::Other business.industry Rate gyro Gyroscope General Medicine Sense (electronics) Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Rotation Piezoelectricity Coriolis vibrating Gyro GaAs bulk machining Computer Science::Other law.invention Condensed Matter::Materials Science Resonator Surface micromachining Optics GaAs piezoelectricity law Wafer business Engineering(all) |
| Zdroj: | Procedia Engineering. 5:1442-1445 |
| ISSN: | 1877-7058 |
| DOI: | 10.1016/j.proeng.2010.09.387 |
| Popis: | Abstract This paper presents a GaAs based piezoelectric Coriolis Vibrating Gyroscope (CVG) which measures rotation rates along the three orthogonal directions of space by using a single vibrating structure. The proposed design shows important sensibilities along the 3 orthogonal directions As a test, some GaAs resonators were realized by GaAs bulk wet etching of 450 μm-thick wafers. This paper begins with a presentation of the principle of a new 3-axis CVG, its design and how GaAs piezoelectricity can be use to actuate and sense it. It is followed by a study of the bulk wet micromachining of GaAs, and the realization of thick GaAs resonators carrying top and back side electrodes. Characteristics of these GaAs resonators are finally presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|