Model-based defect detection on structured surfaces having optically unresolved features
| Autor: | Daniel P. O'Connor, Claudiu Giusca, Richard Leach, Andrew Henning, Jeremy M. Coupland, Ben Sherlock |
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| Rok vydání: | 2015 |
| Předmět: |
Ideal (set theory)
Computer science business.industry Machine vision Materials Science (miscellaneous) Fourier optics 02 engineering and technology Iterative reconstruction 01 natural sciences Industrial and Manufacturing Engineering 010309 optics Optics 0103 physical sciences 0202 electrical engineering electronic engineering information engineering 020201 artificial intelligence & image processing Business and International Management business High dynamic range |
| Zdroj: | Applied optics. 54(30) |
| ISSN: | 1539-4522 |
| Popis: | In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions. |
| Databáze: | OpenAIRE |
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