Design and Analyses of a MEMS Based Resonant Magnetometer
| Autor: | Lingqi Wu, Dahai Ren, Zheng You, Meizhi Yan, Muzhi Hu, Ming-Yang Cui |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
Engineering
Magnetometer Acoustics capacitance Substrate (electronics) lcsh:Chemical technology Biochemistry Capacitance Article Analytical Chemistry law.invention symbols.namesake Resonator Lorentz force law lcsh:TP1-1185 Sensitivity (control systems) Electrical and Electronic Engineering Instrumentation Microelectromechanical systems business.industry Electrical engineering simulation Atomic and Molecular Physics and Optics MEMS symbols magnetometer business Beam (structure) |
| Zdroj: | Sensors; Volume 9; Issue 9; Pages: 6951-6966 Sensors (Basel, Switzerland) Sensors, Vol 9, Iss 9, Pp 6951-6966 (2009) |
| ISSN: | 1424-8220 |
| DOI: | 10.3390/s90906951 |
| Popis: | A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment. |
| Databáze: | OpenAIRE |
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