High-speed alternative phase-extraction method for imaging array-coupled binary moiré interferometry
Autor: | J. Josiah Steckenrider, J. Scott Steckenrider |
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Rok vydání: | 2015 |
Předmět: | |
Zdroj: | Applied optics. 54(30) |
ISSN: | 1539-4522 |
Popis: | An alternative phase-extraction methodology is presented for high-resolution moire analysis, in which the projected and imaged pattern is imaged by a charge-coupled device (CCD) array relatively spaced at three pixels per period. The profilometric method uses a photolithographically printed binary pattern with a 33.3% duty cycle symmetrically projected and imaged using telecentric lenses. The resulting surface height map reduces phase error by 33% when compared to conventional sinusoidal projection and extraction methods. The presented system has the ability to resolve surface features with a lateral resolution of |
Databáze: | OpenAIRE |
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