Comparison of On-Chip Mis Capacitors Based on Stacked Hfo2/Al2o3 Nanolaminates

Autor:	Aslihan Kartci, Silvester Vancik, Jan Prasek, Radim Hrdy, Michael Schneider, Ulrich Schmid, Jaromir Hubalek
Rok vydání:	2022
Předmět:	History Polymers and Plastics Mechanics of Materials Materials Chemistry General Materials Science Business and International Management Industrial and Manufacturing Engineering
Zdroj:	SSRN Electronic Journal.
ISSN:	1556-5068
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07c2c9a2e8ca08b497c574935cb1098f https://doi.org/10.2139/ssrn.4169554 Zobrazit plný text záznamu