Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment
| Autor: | Norbert Kaiser, Andreas Tünnermann, Olaf Stenzel, Mario Held, Steffen Wilbrandt |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
optical monitoring
business.industry Industrial production longpass filter Electron beam physical vapor deposition Coating deposition Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention beamsplitter quartz crystal monitoring law Scientific method electron beam evaporation Process engineering business Instrumentation Beam splitter |
| Popis: | The applicability of broadband optical monitoring to an industrial optical coating production environment is investigated. Different monitoring strategies have been applied to the deposition of beamsplitters and longpass edge filters by electron beam evaporation without any plasma or ion assistance. While the shift and reproducibility in the optical constants were poorly specified, pure optical broadband monitoring of the coatings did not prove superior to traditional quartz crystal monitoring. On the contrary, the introduction of a hybrid monitoring strategy that combines quartz crystal and broadband optical monitoring led to significant improvements in the coating performance reproducibility compared to a pure quartz crystal monitoring approach. Accompanying computational manufacturing experiments performed for the beamsplitter design reveal the same trend. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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