Meander anisotropic magnetoresistance bridge geomagnetic sensors
| Autor: | Anh Tuan Phung, Nguyen Huu Duc, D.Q. Viet, D.T. Huong Giang, L.K. Quynh, N.T. Thuy, Bui Dinh Tu |
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| Rok vydání: | 2019 |
| Předmět: |
Fabrication
Materials science Magnetoresistance business.industry Materials Science (miscellaneous) 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Magnetic flux 0104 chemical sciences Electronic Optical and Magnetic Materials Magnetic field Biomaterials Meander (mathematics) Earth's magnetic field lcsh:TA401-492 Ceramics and Composites Optoelectronics lcsh:Materials of engineering and construction. Mechanics of materials 0210 nano-technology business Anisotropy Sensitivity (electronics) |
| Zdroj: | Journal of Science: Advanced Materials and Devices, Vol 4, Iss 2, Pp 327-332 (2019) |
| ISSN: | 2468-2179 |
| Popis: | Anisotropic magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based sensors. Our study paves a new pathway for the design and application of geomagnetic devices. Keywords: Magnetic sensor, Anisotropic magnetoresistance, Wheatstone bridge sensor, Geomagnetic devices, Permalloy |
| Databáze: | OpenAIRE |
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