Supplementary document for High accuracy cross-sectional shape analysis by coherent soft X-ray diffraction - 4790761.pdf

Autor: Hoshino, Tetsuya, Shiono, Masahiko, Saswatee Banerjee, Aoki, Sadao, Sakurai, Kenji, Itoh, Masahide
Rok vydání: 2020
DOI: 10.6084/m9.figshare.12869639.v2
Popis: Supplements 1, 2 and 3
Databáze: OpenAIRE