Supplementary document for High accuracy cross-sectional shape analysis by coherent soft X-ray diffraction - 4790761.pdf
Autor: | Hoshino, Tetsuya, Shiono, Masahiko, Saswatee Banerjee, Aoki, Sadao, Sakurai, Kenji, Itoh, Masahide |
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Rok vydání: | 2020 |
DOI: | 10.6084/m9.figshare.12869639.v2 |
Popis: | Supplements 1, 2 and 3 |
Databáze: | OpenAIRE |
Externí odkaz: |