High accuracy method for Auger analysis of the composition of uncleaned silicon oxide surface

Autor:	S. Ya. Salomatin, S. V. Appolonov, B. M. Kostishko
Rok vydání:	2004
Předmět:	Auger electron spectroscopy Materials science Physics::Instrumentation and Detectors Annealing (metallurgy) Applied Mathematics Nanocrystalline silicon Analytical chemistry Porous silicon Spectral line Density of states Auger analysis Atomic physics Silicon oxide Instrumentation
Zdroj:	Measurement Techniques. 47:1032-1038
ISSN:	1573-8906 0543-1972
DOI:	10.1007/s11018-005-0053-9
Popis:	A new procedure is described for preparing standard spectra of the inverse self-convolution of the density of states for silicon oxide required for performing non-destructive quantitative Auger analysis of SiOx. Research results are used for determining the composition of silicon oxide formed at the surface of quantum threads in porous silicon with high-temperature annealing in a hydrogen atmosphere and during water etching.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::06af162e6b801459b479353c01da315f https://doi.org/10.1007/s11018-005-0053-9 Zobrazit plný text záznamu Full text from SpringerLink