Lifetime Stability and Microstructure Properties of Cr/B4C X-ray Reflective Multilayer Coatings
| Autor: | Julien E. Rault, Evgueni Meltchakov, Franck Delmotte, Regina Soufli, Christopher C. Walton, Catherine Burcklen, Eric M. Gullikson, Jennifer Rebellato |
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| Přispěvatelé: | Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Lawrence Livermore National Laboratory (LLNL), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Lawrence Berkeley National Laboratory [Berkeley] (LBNL) |
| Rok vydání: | 2019 |
| Předmět: |
Diffraction
Materials science 010308 nuclear & particles physics Chrominum Biomedical Engineering Analytical chemistry Soft X-rays Bioengineering General Chemistry Photon energy Condensed Matter Physics Microstructure 01 natural sciences 010309 optics Diffusion layer Boron Carbide Multilayers Electron diffraction Transmission electron microscopy 0103 physical sciences [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] General Materials Science Spectroscopy Layer (electronics) |
| Zdroj: | Journal of Nanoscience and Nanotechnology Journal of Nanoscience and Nanotechnology, American Scientific Publishers, 2019, 19 (1), pp.554-561. ⟨10.1166/jnn.2019.16480⟩ |
| ISSN: | 1533-4880 |
| DOI: | 10.1166/jnn.2019.16480 |
| Popis: | International audience; This paper demonstrates that highly reflective Cr/B 4 C multilayer interference coatings with nano-metric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B 4 C multilayers is also examined, with emphasis on the B 4 Con -Cr interface where a significant diffusion layer is formed and on the oxide in the top B 4 C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray pho-toelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B 4 C layer structure. |
| Databáze: | OpenAIRE |
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