Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone

Autor:	James A. Bellow, Mark Saly, Jaakko Julin, Joseph P. Klesko, Timo Sajavaara, Charles H. Winter
Jazyk:	angličtina
Rok vydání:	2016
Předmět:	Inorganic chemistry metallic thin films chemistry.chemical_element 02 engineering and technology Manganese 010402 general chemistry 01 natural sciences Atomic layer deposition X-ray photoelectron spectroscopy Thin film Boron otsoni ta116 ta114 Surfaces and Interfaces atomikerroskasvatus 021001 nanoscience & nanotechnology Condensed Matter Physics 0104 chemical sciences Surfaces Coatings and Films Amorphous solid ozone chemistry atomic layer deposition manganese borate 0210 nano-technology Cobalt Stoichiometry
Popis:	The atomic layer deposition (ALD) of films with the approximate compositions Mn3(BO3)2 and CoB2O4 is described using MnTp2 or CoTp2 [Tp ¼ tris(pyrazolyl)borate] with ozone. The solid state decomposition temperatures of MnTp2 and CoTp2 are 370 and 340 C, respectively. Preparative-scale sublimations of MnTp2 and CoTp2 at 210 C/0.05 Torr afforded >99% recoveries with
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::050a9b22993108f7364ac2971f7c4ae9 http://urn.fi/URN:NBN:fi:jyu-201609124078 Zobrazit plný text záznamu