Laser energy absorption prediction of silicon substrate surface from a mid- and high-spatial frequency error
| Autor: | Yongxiang Shen, Yaoyu Zhong, Gang Zhou, Ye Tian, Ci Song, Shuai Xue, Furen Li, Feng Shi |
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| Rok vydání: | 2020 |
| Předmět: |
White light interferometry
Materials science business.industry 02 engineering and technology Substrate (electronics) Surface finish 021001 nanoscience & nanotechnology Laser 01 natural sciences Atomic and Molecular Physics and Optics law.invention 010309 optics Wavelength Optics law Attenuation coefficient Ball grid array 0103 physical sciences 0210 nano-technology business Absorption (electromagnetic radiation) |
| Zdroj: | Optics express. 28(23) |
| ISSN: | 1094-4087 |
| Popis: | Additional laser energy absorption of optical elements limits the further development of high-energy laser systems. In engineering, inexpensive and precise absorption test technology is essential. We attempt to predict energy absorption via surface spatial error value based on the roughness-induced absorption (RIA) theory. However, the absorption coefficients cannot match roughness values measured with an atomic force microscope or white light interferometer. We find three influencing factors and optimize the definition of RIA to spatial error-induced absorption (SEIA). SEIA is proportional to δ2 of a mid- and high-spatial frequency error in a certain frequency range. This range depends on laser diameter, wavelength, and coating. Excluding the absorption induced by fabrication defects, the total absorption can be classified into SEIA and background absorption (BGA). BGA is decided by material and process technology, which can be obtained by calculations. The sum of SEIA and BGA is predictable because both can be estimated. The substrate absorption of high-energy optics can be semi-quantificationally predicted. SEIA provides a new angle to research element-absorbed laser energy for high-power laser technologies. |
| Databáze: | OpenAIRE |
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