Nonlinear cancellation in weakly coupled MEMS resonators
| Autor: | Guillermo Sobreviela, Aref Mustafazade, Chun Zhao, Milind Pandit, Ashwin A. Seshia |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
Physics 010401 analytical chemistry Stiffness 01 natural sciences 5103 Classical Physics 0104 chemical sciences Vibration Nonlinear system Resonator Amplitude Control theory Quantum electrodynamics 0103 physical sciences medicine Sensitivity (control systems) medicine.symptom 010306 general physics 51 Physical Sciences Coupling coefficient of resonators 40 Engineering |
| DOI: | 10.17863/cam.26500 |
| Popis: | © 2017 IEEE. For the first time, this paper demonstrates the cancellation of nonlinear response in weakly coupled resonators. It has been observed that by working in the region where the mechanical nonlinearity of the resonators and the electrical nonlinearity of the electrostatic coupling cancel, the output current amplitudes are increased by 4x while the trend of vibration amplitude variation upon stiffness perturbations is preserved as seen in the linear regime of the resonators. |
| Databáze: | OpenAIRE |
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