Acoustic investigation of porous silicon layers
| Autor: | Alain Foucaran, Y. Boumaiza, Thierry Taliercio, J.M. Saurel, R.J.M. da Fonseca, J. Camassel, E. Massone |
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| Přispěvatelé: | Centre d'Electronique et de Micro-optoélectronique de Montpellier (CEM2), Université Montpellier 2 - Sciences et Techniques (UM2)-Centre National de la Recherche Scientifique (CNRS), Groupe d'étude des semiconducteurs (GES) |
| Rok vydání: | 1995 |
| Předmět: |
Materials science
Silicon Physics::Instrumentation and Detectors Modulus Acoustic microscopy chemistry.chemical_element Mineralogy Young's modulus 02 engineering and technology Porous silicon 01 natural sciences symbols.namesake chemistry.chemical_compound Hydrofluoric acid 0103 physical sciences General Materials Science Rayleigh scattering Composite material Porosity ComputingMilieux_MISCELLANEOUS 010302 applied physics Mechanical Engineering 021001 nanoscience & nanotechnology [SPI.TRON]Engineering Sciences [physics]/Electronics chemistry Mechanics of Materials symbols 0210 nano-technology |
| Zdroj: | Journal of Materials Science Journal of Materials Science, Springer Verlag, 1995, 30 (1), pp.35-39. ⟨10.1007/BF00352128⟩ |
| ISSN: | 1573-4803 0022-2461 |
| DOI: | 10.1007/bf00352128 |
| Popis: | Porous silicon (PS) layers are formed on p+ -type silicon wafers by electrochemical anodization in hydrofluoric acid solutions. Microechography and acoustic signature, V(z), have been performed at 1.5 GHz and 600 MHz, respectively, in order to study the elastic properties of PS layers. The thicknesses of PS layers were measured and longitudinal, shear and Rayleigh velocities and Young's modulus were obtained as a function of porosity. Equations showing the porosity dependence of bulk wave velocities and Young's modulus have also been proposed. |
| Databáze: | OpenAIRE |
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