Thin film analysis in the nanometer scale

Autor:	Klaus Wetzig, Hans-Dietrich Bauer
Rok vydání:	1996
Předmět:	Range (particle radiation) business.industry Chemistry Resolution (electron density) Nanotechnology Electron Mass spectrometry Biochemistry Analytical Chemistry Transmission electron microscopy Optoelectronics Nanometre Thin film business Characteristic energy
Zdroj:	Analytical and Bioanalytical Chemistry. 355:447-451
ISSN:	1618-2650 1618-2642
DOI:	10.1007/s0021663550447
Popis:	A survey is presented on the present state of the art in analytical transmission electron microscopy (ATEM). An essential advantage of this method is the simultaneous use of imaging, analytical and microdiffraction techniques with a lateral resolution in the 1...5 nm range. Two different analytical techniques are frequently used as ATEM attachments, energy dispersive X-ray spectrometry (EDXS) and electron energy loss spectrometry (EELS). Microscopic images with nanometer resolution may be also produced by energy selected imaging (ESI) with characteristic energy loss electrons. Advantages and limitations of all these methods will be discussed using actual material problems in the field of thin film research.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::029b187ae6e9e25f01aeb429e64e602d https://doi.org/10.1007/s0021663550447 Zobrazit plný text záznamu Full text from SpringerLink