Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
| Autor: | Qing Wang, Arnaud Bertsch, David Forchelet, Kristopher Pataky, Willyan Hasenkamp, Jimmy Villard, Harald van Lintel, Philippe Renaud |
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| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Male
Silicon Materials science Pressure monitoring Strain sensor Pressure sensor Finite Element Analysis Biomedical Engineering Catheter-tip Blood Pressure Biosensing Techniques Article law.invention Mice law Heart Rate Pressure Microtechnology Animals Composite material Molecular Biology Microelectromechanical systems Equipment Design Micro-Electrical-Mechanical Systems Piezoresistive effect Finite element method SU-8 Mice Inbred C57BL Surface micromachining Resins Synthetic Pressure measurement Polyimide Biosensor |
| Zdroj: | Biomedical Microdevices Biomedical Microdevices, vol. 14, no. 5, pp. 819-828 |
| ISSN: | 1572-8781 1387-2176 |
| Popis: | This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo. |
| Databáze: | OpenAIRE |
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