VOC Sensing Using Batch-fabricated Temperature Compensated Self-Leveling Microstructures
| Autor: | Aishwaryadev Banerjee, Apratim Majumder, Hanseup Kim, Mohit Karkhanis, Rugved Likhite, Carlos H. Mastrangelo |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Fabrication FOS: Physical sciences 02 engineering and technology Applied Physics (physics.app-ph) 010402 general chemistry 01 natural sciences Capacitance Compensation (engineering) Materials Chemistry Electrical and Electronic Engineering Absorption (electromagnetic radiation) Instrumentation chemistry.chemical_classification business.industry Metals and Alloys Response time Polymer Physics - Applied Physics 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Optoelectronics 0210 nano-technology business Polyimide |
| Popis: | We present the design, fabrication, and response of a low-power, polymer-based VOC sensor based on the self-leveling of mechanically leveraged structures. The device utilizes folded polymer-coated microcantilevers to achieve passive temperature compensation without the need for additional compensating sensors or electronics. We demonstrate that a self-leveling vapor sensor provides the same gas response as a simple microcantilever geometry, showing ~20% change in device capacitance when subjected to 35-85 %RH change while showing nearly-zero baseline drift due to changes in ambient temperature when the temperature is increased from 23-72{\deg}C which is ~52-fold better than a simple microcantilever geometry. The response of the VOC sensor was measured using three polymers (Polyimide, Polyurethane, and PDMS) against five different analytes (Ethanol, Acetone, Benzene, Hexane, and Water) and an SVM-based model was used to show target specificity. The sensor also showed an absorption response time ({\tau}90) of ~138s. We propose that the self-leveling vapor sensor geometry is a significant improvement to a simple microcantilever vapor sensor as it offers the same performance but shows near-complete elimination of temperature-induced baseline drift. Comment: 15 pages, 13 figures. Manuscript accepted for publication in Sensors and Actuators B: Chemical |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|