Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications
| Autor: | Thomas Gessner, Holger Fiedler, Heinrich Lang, Sascha Hermann, Andrea Sendzik, Alexander Villabona, Marcel Melzer, Steve MüLler, Thomas Waechtler, Robert Mothes, Dietrich R. T. Zahn, Michael Hietschold, Stefan E. Schulz, Raul D. Rodriguez |
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| Přispěvatelé: | Fraunhofer Institute for Electronic Nano Systems (ENAS), Chemnitz University of Technology, Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
Copper oxide
Materials science Atomlagenabscheidung Kupfer Kupferoxid Kohlenstoffnanoröhren ddc:621.3 Atomschichtepitaxie Kohlenstoff-Nanoröhre Diketonate Kupfer Kupferoxide Metallisierungsschicht ULSI chemistry.chemical_element Nanotechnology Carbon nanotube Carbide law.invention chemistry.chemical_compound symbols.namesake Atomic layer deposition law ddc:530 Electrical and Electronic Engineering Thermal oxidation Carbon nanotubes CNT Atomic layer deposition ALD Copper Copper oxide Interconnect Thermal oxidation Condensed Matter Physics Copper Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Chemical engineering Transmission electron microscopy ddc:540 symbols ddc:620 Raman spectroscopy |
| Zdroj: | Microelectron. Eng. 107, 223-228 (2013). Digital Object Identifier: 10.1016/j.mee.2012.10.026 |
| DOI: | 10.1016/j.mee.2012.10.026 |
| Popis: | The following is the accepted manuscript of the original article: Marcel Melzer, Thomas Waechtler, Steve Müller, Holger Fiedler, Sascha Hermann, Raul D. Rodriguez, Alexander Villabona, Andrea Sendzik, Robert Mothes, Stefan E. Schulz, Dietrich R.T. Zahn, Michael Hietschold, Heinrich Lang and Thomas Gessner “Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications”, Microelectron. Eng. 107, 223-228 (2013). Digital Object Identifier: 10.1016/j.mee.2012.10.026 Available via http://www.sciencedirect.com or http://dx.doi.org/10.1016/j.mee.2012.10.026 © 2013 Elsevier B.V. Carbon nanotubes (CNTs) are a highly promising material for future interconnects. It is expected that a decoration of the CNTs with Cu particles or also the filling of the interspaces between the CNTs with Cu can enhance the performance of CNT-based interconnects. The current work is therefore considered with thermal atomic layer deposition (ALD) of CuxO from the liquid Cu(I) β-diketonate precursor [(nBu3P)2Cu(acac)] and wet oxygen at 135°C. This paper focuses on different thermal in-situ pre-treatments of the CNTs with O2, H2O and wet O2 at temperatures up to 300°C prior to the ALD process. Analyses by transmission electron microscopy show that in most cases the CuxO forms particles on the multi-walled CNTs (MWCNTs). This behavior can be explained by the low affinity of Cu to form carbides. Nevertheless, also the formation of areas with rather layer-like growth was observed in case of an oxidation with wet O2 at 300°C. This growth mode indicates the partial destruction of the MWCNT surface. However, the damages introduced into the MWCNTs during the pre treatment are too low to be detected by Raman spectroscopy. |
| Databáze: | OpenAIRE |
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