Compact Superconducting Microwave Resonators Based on Al-AlOx -Al Capacitors
| Autor: | Julia Zotova, Rui Wang, Alexander Semenov, Yu Zhou, Ivan Khrapach, Akiyoshi Tomonaga, Oleg Astafiev, Jaw-Shen Tsai |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Physical Review Applied. 19 |
| ISSN: | 2331-7019 |
| DOI: | 10.1103/physrevapplied.19.044067 |
| Popis: | We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\mathrm{Al/AlO_x/Al}$) parallel-plate capacitors. The size of the resonators is only 0.04~$\mathrm{mm^2}$, which is more than one order smaller than the typical size of coplanar resonators (1~$\mathrm{mm^2}$). The fabrication method we developed easily fits into the standard superconducting qubits fabrication process. We have obtained capacitance per area 14~fF/$\mathrm{\mu m^2}$ and the internal quality factor $\mathrm{1\times 10^3 - 8\times 10^3}$ at the single-photon level. Our results show that such devices based on $\mathrm{Al/AlO_x/Al}$ capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0-\pi$ qubit. Comment: 11 pages, 5 figures |
| Databáze: | OpenAIRE |
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