Bit Patterned Magnetic Recording: Theory, Media Fabrication, and Recording Performance
| Autor: | Yuri N. Obukhov, Tsai-Wei Wu, Manfred Ernst Schabes, Olav Hellwig, Kurt A. Rubin, Dan S. Kercher, Zuwei Liu, Daniel Bedau, Toshiki Hirano, Bruce Alvin Gurney, Kanaiyalal C. Patel, David Berman, C. Mathew Mate, J.-M. L. Beaujour, Julia D. Cushen, Pierre-Olivier Jubert, Hitesh Arora, Alexei Bogdanov, Weldon Mark Hanson, E. Dobisz, Gregory S. Doerk, Vipin Ayanoor-Vitikkate, He Gao, Thomas R. Albrecht, Ricardo Ruiz, Michael Grobis, Dieter Weller, En Yan, Lei Wan, Yves-Andre Chapuis, Jeffrey S. Lille |
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| Rok vydání: | 2015 |
| Předmět: |
Condensed Matter - Materials Science
Fabrication Materials science business.industry B.4.2 B.3.2 Materials Science (cond-mat.mtrl-sci) FOS: Physical sciences Context (language use) Electronic Optical and Magnetic Materials Nanoimprint lithography law.invention Condensed Matter - Other Condensed Matter Nanolithography law Patterned media Multiple patterning Optoelectronics Electrical and Electronic Engineering business Lithography Energy (signal processing) Other Condensed Matter (cond-mat.other) |
| DOI: | 10.48550/arxiv.1503.06664 |
| Popis: | Bit Patterned Media (BPM) for magnetic recording provide a route to densities $>1 Tb/in^2$ and circumvents many of the challenges associated with conventional granular media technology. Instead of recording a bit on an ensemble of random grains, BPM uses an array of lithographically defined isolated magnetic islands, each of which stores one bit. Fabrication of BPM is viewed as the greatest challenge for its commercialization. In this article we describe a BPM fabrication method which combines e-beam lithography, directed self-assembly of block copolymers, self-aligned double patterning, nanoimprint lithography, and ion milling to generate BPM based on CoCrPt alloys. This combination of fabrication technologies achieves feature sizes of $ 44 pages |
| Databáze: | OpenAIRE |
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