Groove Formation in Glass Substrate by a UV Nanosecond Laser
| Autor: | Kimoon Nam, Joonghan Shin |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Soda-lime glass
Shock wave Materials science 02 engineering and technology Substrate (electronics) medicine.disease_cause 01 natural sciences lcsh:Technology law.invention 010309 optics lcsh:Chemistry Optics law nanosecond laser 0103 physical sciences groove medicine General Materials Science Laser power scaling laser grooving ultra violet (UV) Instrumentation lcsh:QH301-705.5 Groove (music) Power density glass Fluid Flow and Transfer Processes business.industry lcsh:T Process Chemistry and Technology General Engineering 021001 nanoscience & nanotechnology Laser lcsh:QC1-999 Computer Science Applications lcsh:Biology (General) lcsh:QD1-999 lcsh:TA1-2040 0210 nano-technology business lcsh:Engineering (General). Civil engineering (General) Ultraviolet lcsh:Physics |
| Zdroj: | Applied Sciences Volume 10 Issue 3 Applied Sciences, Vol 10, Iss 3, p 987 (2020) |
| ISSN: | 2076-3417 |
| DOI: | 10.3390/app10030987 |
| Popis: | This study reports the laser grooving of glass. In this study, an ultraviolet (UV) nanosecond laser is used to produce grooves in soda lime glass by varying laser power, scan speed, pulse repetition rate, and number of scans. The threshold power density to generate damage on glass surface is found to be ~6.37 × 108 W/cm2. According to the result of a single laser scan, at a high laser power and low scan speed, material removal does not nearly occur, and only volume melting underneath the glass surface and large thermal crack are induced. With the decreasing laser power and increasing scan speed, a groove with a smooth surface is formed owing to the melting-dominant material removal process. The groove of rough surface morphology is produced with the further increase of the scan speed due to shattering induced by shock wave. Under this condition, it is found that either small cracks are produced or a crack-free groove is obtained. In this study, the fabrication of the microchannel for bio-chip application is also attempted by multiple laser scans. The near rectangular-shaped and crack-free groove (width × depth: ~220 &mu m × ~500 &mu m) with quite a smooth surface is fabricated by the multiple laser scans with a non-zero scan spacing. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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