Research of the dielectric properties of polyethyleneterephthalate modified by fluorocarbon films formed by ion-plasma technology methods

Autor:	V I Kuzkin, O I Obrezkov, Yu Ya Yakushkin, V M Elinson
Rok vydání:	2019
Předmět:	Permittivity History Film coating Materials science Chemical engineering Etching (microfabrication) Dielectric loss Fluorocarbon Chemical vapor deposition Dielectric Computer Science Applications Education Ion
Zdroj:	Journal of Physics: Conference Series. 1396:012026
ISSN:	1742-6596 1742-6588
Popis:	The paper presents the results of a study of polyethyleneterephthalate (PET), modified by nanostructured fluorocarbon films formed by vapor deposition in a vacuum using a two-component gas mixture containing a film coating component (C6H12) and an etching component (CF4). The dependence of the dielectric loss tangent and permittivity on the ratio of the components of the gas mixture is established. The obtained data were correlated with the physicochemical characteristics of the materials used.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fff41ce16c6107d264cafdc5e613a0d4 https://doi.org/10.1088/1742-6596/1396/1/012026 Zobrazit plný text záznamu