Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam

Autor:	Takashi Katsuki, Fumihiko Nakazawa, Hisao Okuda, Takeaki Shimanouchi, Satoshi Ueda, Osamu Toyoda, Tadashi Nakatani
Rok vydání:	2012
Předmět:	Radio frequency microelectromechanical system Microelectromechanical systems Materials science business.industry Electronic engineering Optoelectronics Insertion loss Three-dimensional integrated circuit Radio frequency business Low voltage Piezoelectricity Ground plane
Zdroj:	3DIC
DOI:	10.1109/3dic.2012.6263007
Popis:	This paper presents the effect of frequency of radio frequency microelectromechanical system (RF MEMS) 3D integration with an actual device. A piezoelectric transducer (PZT)-actuated RF MEMS switch that uses a single crystal silicon asymmetric beam was designed, fabricated, and evaluated. We successfully drove a stiff beam (with spring constant > 2,000 N/m) despite a low voltage (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ffee83dde2643013d02296e1acee8876 https://doi.org/10.1109/3dic.2012.6263007 Zobrazit plný text záznamu