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In this paper, BiFeO3 (BFO) films were grown on LaAlO3 (LAO) substrate by a RF magnetron sputtering system. Fabrication parameters, such as work pressure, sputtering atmosphere, and post annealing were examined in terms of their influences on characteristics of the ferroelectric films. X-Ray diffraction, Raman scattering and scanning electron microscope measurements were employed to characterize the microstructure and the morphology of these films. At last, the ferroelectric characteristic of BFO has been studied, and the film has a large saturated polarization of 40 μC / cm2 under an applied field of 12 kV /cm. |
