Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

Autor:	D. Newton, I. M. Odeh, J.B.A. England, Phillip John, Michael J. Tricker, John I. B. Wilson, M. J. K. Thomas
Rok vydání:	1981
Předmět:	Amorphous silicon Elastic scattering Glow discharge Materials science Silicon Hydrogen General Engineering General Physics and Astronomy chemistry.chemical_element Infrared spectroscopy Condensed Matter Physics Omega chemistry.chemical_compound chemistry Atom Atomic physics
Zdroj:	Journal of Physics C: Solid State Physics. 14:309-318
ISSN:	0022-3719
DOI:	10.1088/0022-3719/14/3/014
Popis:	The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.
Databáze:	OpenAIRE
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