Modeling, fabrication, and structural characterization of thin film ZnO based film bulk acoustic resonator
| Autor: | Dharmendar Boolchandani, Hemant Kumar, Tarun Varma, Chinnamuthan Periasamy, Arun Kishor Johar, Ashish Kumar, Gaurav Sharma, Ajay Agarwal |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Shadow mask Fabrication Materials science business.industry Multiphysics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Evaporation (deposition) Sputtering 0103 physical sciences Surface roughness Figure of merit Optoelectronics Thin film 0210 nano-technology business |
| Zdroj: | Materials Today: Proceedings. 46:5716-5721 |
| ISSN: | 2214-7853 |
| DOI: | 10.1016/j.matpr.2021.01.171 |
| Popis: | This work reports the finite element modeling, fabrication and structural characterization a film bulk acoustic resonator (FBAR) devices using shadow mask technique. For the performance analysis of the FBAR device, simulations were performed on COMSOL Multiphysics platform. RF sputtering technique is used to deposit c-axis oriented zinc oxide (ZnO) thin film on Aluminum electrodes. The Aluminum electrodes were deposited using e-beam evaporation technique. The X-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscopy (SEM) techniques were used to examine the surface morphologies of the deposited piezoelectric film (ZnO). The quality of the deposited piezoelectric material film was measured with the help of XRD spectra and AFM is used to measure surface roughness of the deposited ZnO film and its measured value is 6.94 nm. The resonant characteristics of fabricated FBAR device are evaluated with the help of COMSOL Multiphysics simulations and the obtained values of effective electromechanical coupling constant (k2eff), quality factors (Qs and Qp) and Figure of merit are 3.0025%, 1811.3, 1711.4 and 54 (approximately), respectively. |
| Databáze: | OpenAIRE |
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