Wafer-scale fabrication of microelectrode arrays on optically transparent polymer foils for the integration of flexible nanoscale devices
Autor: | Sven Ingebrandt, Xiaoling Lu, Walid-Madhat Munief, Vivek Pachauri, Ruben Lanche |
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Rok vydání: | 2018 |
Předmět: |
chemistry.chemical_classification
Fabrication Materials science Scale (ratio) Nanotechnology 02 engineering and technology Polymer 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials Microelectrode chemistry Wafer Electrical and Electronic Engineering 0210 nano-technology Nanoscopic scale |
Zdroj: | Flexible and Printed Electronics. 3:044001 |
ISSN: | 2058-8585 |
DOI: | 10.1088/2058-8585/aae3b6 |
Databáze: | OpenAIRE |
Externí odkaz: |