Envelope analysis in spectroscopic ellipsometry of thin films. Application to a weakly-absorbing polymer film
| Autor: | J. C. Martinez-Anton, José A. Gómez-Pedrero, Alberto Álvarez-Herrero |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
chemistry.chemical_classification
Materials science medicine.diagnostic_test business.industry Metals and Alloys Surfaces and Interfaces Polymer Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Optics chemistry Singular solution law Ellipsometry Spectrophotometry Materials Chemistry medicine Optoelectronics Photolithography Thin film business Refractive index Envelope (waves) |
| Zdroj: | Thin Solid Films. :288-291 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2004.01.014 |
| Popis: | The envelope technique is a powerful analytical tool already known in spectrophotometry, but only recently introduced in ellipsometry. We will develop its formalism for tan ψ in weakly absorbing interference films and see how data extraction can be greatly simplified. The envelope technique permits to separate the extraction of the refractive index of the film from the thickness. Therefore, it is ideal for those moderately thick films affected by multivalued solutions in conventional regressions, typically in polymer film preparations. We present some experimental results for a photolithographic resin deposited on glass. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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