69.2:Distinguished Paper: High Reliable a-IGZO TFTs with Self-Aligned Coplanar Structure for Large-Sized Ultrahigh-Definition OLED TV

Autor: Jin-Woo Kwon, Woo-Sup Shin, Chanki Ha, Soo-Youle Cha, Seong-Yoon Seok, Kwi-Young Yun, Heung-Jo Lee, Chang-II Ryoo, Bong-Chul Kim
Rok vydání: 2015
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 46:1020-1022
ISSN: 0097-966X
DOI: 10.1002/sdtp.10346
Popis: Self-aligned coplanar oxide TFTs have been developed for large-sized UHD OLED TV. Metallized active films were employed as source/ drain regions. By applying light shield layer, it was made possible to suppress photo-induced threshold voltage shift and obtain excellent output characteristics. The maximum difference of threshold voltages of a-IGZO TFTs on Gen. 8.5 glass is approximately 0.57V. Also, a-IGZO TFTs reveal good reliability showing threshold voltage shift of 0.07V and 0.03V after 1h of PBTS and 10h of CS, respectively. This work should play an important role in commercializing large-sized UHD OLED TV.
Databáze: OpenAIRE