| Autor: |
Edward Davies, David Solomon George, Malcolm C. Gower, Andrew S. Holmes |
| Rok vydání: |
2013 |
| Předmět: |
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| Zdroj: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/memsys.2013.6474315 |
| Popis: |
A method is reported for improving the performance of a Fabry-Perot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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