High Quality GaN on Si(111) using (AlN/GaN)x Superlattice and Maskless ELO

Autor:	Pierre Gibart, Bernard Beaumont, Philippe Vennéguès, O. Tottereau, V. Bousquet, Hacene Lahreche, M. Laügt
Rok vydání:	2000
Předmět:	Quality (physics) Materials science Mechanics of Materials business.industry Mechanical Engineering Superlattice Optoelectronics General Materials Science Metalorganic vapour phase epitaxy Condensed Matter Physics business
Zdroj:	Materials Science Forum. :1487-1490
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.338-342.1487
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fe96c14adf2f79fc2c707c5440b10fa3 https://doi.org/10.4028/www.scientific.net/msf.338-342.1487 Zobrazit plný text záznamu