Scanning probe tips formed by focused ion beams

Autor:	M.J. Vasile, J. E. Griffith, D. A. Grigg, E. A. Fitzgerald, Phillip E. Russell
Rok vydání:	1991
Předmět:	Nanostructure Materials science business.industry Curvature Focused ion beam Ion law.invention Metrology Optics Machining law Crystallite Scanning tunneling microscope business Instrumentation
Zdroj:	Review of Scientific Instruments. 62:2167-2171
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1142334
Popis:	Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt‐Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12±3° and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fe8c25508420bf1b27b600084fe53a8e https://doi.org/10.1063/1.1142334 Zobrazit plný text záznamu