ZnO transparent thin films for gas sensor applications
| Autor: | George Kiriakidis, N. Katsarakis, Mirela Petruta Suchea, K. Moschovis, S. Christoulakis |
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| Rok vydání: | 2006 |
| Předmět: |
Materials science
business.industry Metals and Alloys Surfaces and Interfaces Surface finish Sputter deposition Surfaces Coatings and Films Electronic Optical and Magnetic Materials Carbon film Optics Sputtering Physical vapor deposition visual_art Materials Chemistry visual_art.visual_art_medium Crystallite Ceramic Composite material Thin film business |
| Zdroj: | Thin Solid Films. 515:551-554 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2005.12.295 |
| Popis: | Zinc oxide (ZnO) transparent thin films were deposited onto silicon and Corning glass substrates by dc magnetron sputtering using metallic and ceramic targets. Surface investigations carried out by Atomic Force Microscopy (AFM) and X-ray Diffraction (XRD) have shown a strong influence of deposition technique parameters on film surface topography. Film roughness (RMS), grain shape and dimensions are correlated with the deposition technique parameters as well as with the target material. XRD measurements have proven that the dc sputtered films are polycrystalline with the (002) as preferential crystallographic orientation. AFM analysis of thin films sputtered from a ceramic target has shown a completely different surface behavior compared with that of the films grown from a metallic target. This work demonstrates that the target material and the growth conditions determine the film surface characteristics. The gas sensing characteristics of these films are strongly influenced by surface morphology. Thus correlating the optical and electrical film properties with surface parameters (i.e. RMS and Grain Radius) can lead to an enhancement of the material's potential for gas sensing applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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