Physical and Electro-Optical Properties of Ion Beam Sputtered Thin Film PLZT Ceramic

Autor:	L.L. Boyer, J.R. Mcneil, A. Y. Wu
Rok vydání:	1990
Předmět:	Materials science Ion beam Pyrochlore engineering.material Tetragonal crystal system visual_art Phase (matter) Cavity magnetron visual_art.visual_art_medium engineering Ceramic Crystallite Thin film Composite material
Zdroj:	MRS Proceedings. 200
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-200-97
Popis:	High quality PLZT thin films have been deposited using ion beam sputtering. The deposited material has perovskite crystal structure tetragonal in phase with the c-axis predominantly normal to the surface. Material deposited at temperatures below 450°C has pyrochlore structure while that deposited above 650°C displays polycrystalline characteristics. The deposition rate was approximately 0.2–0.5 Å/sec yielding film thicknesses of ∼4500 Å. The surface morphology of the deposited films is of high quality with a RMS roughness 60% that of magnetron sputtered films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fe0ed8136586da799d87a595eb774541 https://doi.org/10.1557/proc-200-97 Zobrazit plný text záznamu Full text from SpringerLink