High-permittivity and low-loss dielectric tunable pyrochlore thin films deposited by radio frequency magnetron sputtering from a lead zinc niobate target
| Autor: | Kyung Hyun Ko, Hyuk Jun Lee, Young-Pyo Hong, Kug Sun Hong, Geun-Kyu Choi, Sung Hun Yoon |
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| Rok vydání: | 2008 |
| Předmět: |
Permittivity
Materials science business.industry Metals and Alloys Pyrochlore Mineralogy Low-k dielectric Surfaces and Interfaces Dielectric engineering.material Surfaces Coatings and Films Electronic Optical and Magnetic Materials Sputtering Physical vapor deposition Materials Chemistry engineering Optoelectronics Dissipation factor Thin film business |
| Zdroj: | Thin Solid Films. 516:2195-2202 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2007.07.149 |
| Popis: | Since Bi 2 O 3 –ZnO–Nb 2 O 5 (BZN) pyrochlore thin films have been introduced as a tunable dielectric, the substitution of Bi with Pb could be a reasonable choice. The PbO–ZnO–Nb 2 O 5 (PZN) cubic pyrochlore thin films were produced by radio frequency sputtering, and their dielectric properties, in terms of tunability, were measured. Up to 33.4% of tunability and comparable K factors with BZN films were obtained. The effects of film crystallization, along with substrate heating and post-annealing on the dielectric properties, were similar to those of BZN. However, strong texturing developed in the PbO–ZnO–Nb 2 O 5 (PZN) films deposited at a high substrate temperature, which caused degradation of the loss tangent and K factor. |
| Databáze: | OpenAIRE |
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