Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist

Autor:	Genggongwo Shi, Jun Bae, Lee Soon Park, Kyeongha Baek
Rok vydání:	2020
Předmět:	chemistry.chemical_classification Acrylate Materials science Double bond Polymer Photoresist law.invention Polyester chemistry.chemical_compound chemistry Chemical engineering law OLED Thermal stability Photolithography
Zdroj:	Materials Sciences and Applications. 11:234-244
ISSN:	2153-1188 2153-117X
DOI:	10.4236/msa.2020.114016
Popis:	Polyimides are well-known for their high chemical inertness and thermal stability. However, it is usually challenging to synthesize UV-curable polyimides since the imidization reaction requires such harsh conditions that acrylate type double bonds cannot withstand. In this work, synthetic methods are developed to obtain polyester-imide type binder polymers with high thermal stability, high compatibility with the other components of the black photoresist, and fine photolithographic patterning property for the negative-tone black photoresist. The syntheses of diimide-diacid or diimide-diol intermediates for the polyesterification with dianhydride gave polyester imides which meets this requirement. The photolithographic tests have shown that the patterning of the micron-sized PDL of the organic light emitting diode (OLED) panel could be obtained. This work will interest the researchers working on the design and optimization of thermally stable binder polymers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fde0d4140b2c871ad93894a902815631 https://doi.org/10.4236/msa.2020.114016 Zobrazit plný text záznamu