Ultralow‐ k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform
| Autor: | Cheng‐Ming Lin, Chuang‐Han Hsu, Wei‐Yu Huang, Vincent Astié, Po‐Hsien Cheng, Yue‐Min Lin, Wei‐Shan Hu, Szu‐Hua Chen, Han‐Yu Lin, Ming‐Yang Li, Blanka Magyari‐Kope, Chi‐Ming Yang, Jean‐Manuel Decams, Tzu‐Lih Lee, Dong Gui, Han Wang, Wei‐Yen Woon, Pinyen Lin, Jeff Wu, Jang‐Jung Lee, Szuya Sandy Liao, Min Cao |
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| Rok vydání: | 2022 |
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| Zdroj: | Advanced Materials Technologies. 7:2200022 |
| ISSN: | 2365-709X |
| DOI: | 10.1002/admt.202200022 |
| Databáze: | OpenAIRE |
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