| Popis: |
A positive-tone, aqueous base soluble, polynorbornene (PNB) dielectric formulation has been developed. The photolitho- graphic solubility switching mechanism is based on diazonaphthoquinone (DNQ) inhibition of PNB resin functionalized with pend- ent fluoroalcohol and carboxylic acid substituents. The optical contrast (at 365 nm) was found to be 2.3. The maximum height-to- width aspect ratio of developed line and space features was 3 : 2. The sensitivity, D100, of a formulation containing 20 pphr of DNQ photoactive compound (PAC) was calculated to be 408 mJ cm � 2 . The effects of the PAC molecule structure on miscibility and disso- lution of the photosensitive films in aqueous base developer were studied. The effect of the monomer composition of the PNB poly- mer on the dissolution rate of the formulated PNB resin was evaluated. A unique dissolution and swelling behavior was observed. The effect is attributed to a copolymer synthesized with two monomers each of which is susceptible to deprotonation in aqueous base. FTIR measurements showed that the pure PNBFA has a small percentage of free hydroxyl groups, which did not change appre- ciably by the addition of PAC to the mixture. V C 2012 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 127: 4653-4661, 2013 |
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