A new method of forming a thin single-crystal silicon diaphragm using merged epitaxial lateral overgrowth for sensor applications
| Autor: | D.W. DeRoo, S.E. Staller, Abul E. Kabir, Gerold W. Neudeck, James Jungho Pak |
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| Rok vydání: | 1991 |
| Předmět: |
Materials science
Silicon business.industry Doping chemistry.chemical_element Silicon on insulator Nanotechnology Substrate (electronics) Epitaxy Electronic Optical and Magnetic Materials chemistry Etching (microfabrication) Optoelectronics Wafer Electrical and Electronic Engineering Thin film business |
| Zdroj: | IEEE Electron Device Letters. 12:614-616 |
| ISSN: | 1558-0563 0741-3106 |
| DOI: | 10.1109/55.119215 |
| Popis: | Merged epitaxial lateral overgrowth (MELO) of silicon was combined with an SiO/sub 2/ etch stop to form a 9- mu m-thick and 250- mu m*1000- mu m single-crystal Si membrane for micromechanical sensors. When epitaxial lateral overgrowth (ELO) silicon merges on SiO/sub 2/ islands, it forms a local silicon-on-insulator (SOI) film of moderate doping concentration. The SiO/sub 2/ island then acts as a near-perfect etch top in a KOH- or ethylenediamine-based solution. The silicon diaphragm thickness over a 3-in wafer has a standard deviation of 0.5 mu m and is precisely controlled by the epitaxial silicon growth rate ( approximately=0.1 mu m/min) rather than by conventional etching techniques. Diodes fabricated in the substrate and over MELO regions have nearly identical reverse-bias currents, indicating good quality silicon in the membrane. > |
| Databáze: | OpenAIRE |
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