Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers
Autor: | Jun Akedo |
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Rok vydání: | 2006 |
Předmět: | |
Zdroj: | Journal of the American Ceramic Society. 89:1834-1839 |
ISSN: | 1551-2916 0002-7820 |
DOI: | 10.1111/j.1551-2916.2006.01030.x |
Popis: | A novel method for depositing ceramic thick films by aerosol deposition (AD) is presented. Submicron ceramics particles are accelerated by gas flow up to 100–500 m/s and then impacted on a substrate, to form a dense, uniform and hard ceramic layer at room temperature. However, actual deposition mechanism has not been clarified yet. To clarify densification mechanism during AD, a mixed aerosol of α-Al2O3 and Pb(Zr, Ti)O3 powder was deposited to form a composite layer in this study. The cross-section of the layer was observed by HR-TEM to investigate the densification and bonding mechanism of ceramic particles. As a result, a plastic deformation of starting ceramic particles at room temperature was observed. |
Databáze: | OpenAIRE |
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