Characteristics of aligned carbon nanotubes synthesized using a high-rate low-temperature process
| Autor: | Jyh-Ming Ting, Kun-Hou Liao |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Hydrogen Scanning electron microscope Mechanical Engineering chemistry.chemical_element Substrate (chemistry) Nanotechnology General Chemistry Carbon nanotube Sputter deposition Electronic Optical and Magnetic Materials law.invention Catalysis Chemical engineering chemistry law Plasma-enhanced chemical vapor deposition Materials Chemistry Electrical and Electronic Engineering Thin film |
| Zdroj: | Diamond and Related Materials. 15:1210-1216 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2005.08.029 |
| Popis: | In this paper, we report the characteristics of carbon nanotubes grown on a novel Fe–Si thin film catalysts at a substrate temperature of 370 °C. The catalyst thin films were prepared using a sputter deposition method. The growth of carbon nanotubes was performed in a microwave plasma chemical vapor deposition (MPCVD) reactor under various methane to hydrogen ratios and different growth times. We have shown that the CNTs grown at a temperature as low as 370 °C and a very high growth rate of 13 μm/min exhibit microstructures as good as those obtained at higher temperatures and lower growth rates. We have also provided evidences to support the assumption and augment made in a previously reported growth mechanism. |
| Databáze: | OpenAIRE |
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