Self-consistent calibration of TixC1-x auger spectra

Autor: Johann Kiefer, Herbert Störi, Paul J. M. Schmölz, Wolfgang S. M. Werner, Horst W. Wagner
Rok vydání: 1998
Předmět:
Zdroj: Surface and Interface Analysis. 26:590-596
ISSN: 1096-9918
0142-2421
DOI: 10.1002/(sici)1096-9918(199807)26:8<590::aid-sia397>3.0.co;2-8
Popis: Auger sputter depth profiling was performed on a specially prepared TiC sample with carbon concentration varying with depth. This resulted in a series of Auger spectra corresponding to Ti x C 1-x , with x varying between 0.1 and 0.95. Although the carbon concentration gradient is not known a priori, there exists a method to associate any of these spectra with a given stoichiometry, utilizing the smooth relationship between the C and Ti signal for a large range of stoichiometries and imposing the constraint of atomic fractions adding np to unity. In this way the stoichiometry of each spectrum has been determined, leading to a large series of standard spectra, that allow the stoichiometry of any unknown Ti x C 1-x specimen to be calibrated on the basis of its Auger spectrum. Sensitivity factors and calibration curves established in this way are given for peak areas, while it was found that it is impossible to establish meaningful calibration curves for Auger peak-to-peak heights owing to chemical effects in the spectra.
Databáze: OpenAIRE
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