Standardization of Characterization of Bulk Micro-defects and Denuded Zones in Annealed CZ Si
Autor: | Ryuji Takeda, Naohisa Inoue, Kazuo Moriya, Kazuhiko Kashima, Kenji Nakashima, Masahiro Kato, Satoru Kitagawa, Toshiaki Ono, Katsuhiko Nakai, Hiroki Urushido, Nobuhito Nango, Vladimir Akhmetov |
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Rok vydání: | 2006 |
Zdroj: | ECS Meeting Abstracts. :542-542 |
ISSN: | 2151-2043 |
Popis: | not Available. |
Databáze: | OpenAIRE |
Externí odkaz: |