Standardization of Characterization of Bulk Micro-defects and Denuded Zones in Annealed CZ Si

Autor: Ryuji Takeda, Naohisa Inoue, Kazuo Moriya, Kazuhiko Kashima, Kenji Nakashima, Masahiro Kato, Satoru Kitagawa, Toshiaki Ono, Katsuhiko Nakai, Hiroki Urushido, Nobuhito Nango, Vladimir Akhmetov
Rok vydání: 2006
Zdroj: ECS Meeting Abstracts. :542-542
ISSN: 2151-2043
Popis: not Available.
Databáze: OpenAIRE