Opto-mechatronic configurations to maximize dynamic range and optimize resolution of optical instruments
| Autor: | Shu-Sheng Lee, Tsung Dar Cheng, Chih-Kung Lee, Chin Kai Chang |
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| Rok vydání: | 2009 |
| Předmět: |
Nanoelectromechanical systems
Microscope Computer science business.industry Dynamic range Optical instrument Astrophysics::Instrumentation and Methods for Astrophysics Physics::Optics Atomic and Molecular Physics and Optics law.invention Metrology Speckle pattern Interferometry Optics law Electronic speckle pattern interferometry Electronic engineering business |
| Zdroj: | Optical Review. 16:133-140 |
| ISSN: | 1349-9432 1340-6000 |
| DOI: | 10.1007/s10043-009-0023-6 |
| Popis: | We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices. |
| Databáze: | OpenAIRE |
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