A Laser Dicing Method for Plus-Shaped Dies for Heterogenous Integration Applications
| Autor: | Aakrati Jain, Kamal Sikka, Shidong Li, Juan-Manuel Gomez, Marc Bergendahl, Spyridon Skordas, Jeroen Van Borkulo, Roman Doll, Kees Biesheuvel, Mark Mueller |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). |
| Databáze: | OpenAIRE |
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